A Two-Port Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer with Reduced Effective Height and Enhanced Sensitivity
Bibliographic record
Abstract
This paper presents a theoretical model and an experimental validation of a two-port multiple moving membrane capacitive micromachined ultrasonic transducer. The developed transducer includes a stack of two flexible membranes suspended on a fixed electrode. The transducer is fabricated utilizing a sacrificial technique, PolyMUMPs, and with a resonant frequency of 1.8 MHz. Electrical measurements are conducted using an impedance analyzer in order to investigate the influence of the transducer's additional moving membrane on the device effective cavity height. This, consequently, influences the transducer acoustic power generation. The deigned two port transducer enables a dynamic change in the effective cavity height through adjusting the applied DC bias voltage. The experimental results validate this hypothesis and are shown in agreement with the theoretical results.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".