A Graph-Theoretic Approach for Spatial Filtering and Its Impact on Mixed-Type Spatial Pattern Recognition in Wafer Bin Maps
Why this work is in the frame
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Bibliographic record
Abstract
Statistical quality control in semiconductor manufacturing hinges on effective diagnostics of wafer bin maps, wherein a key challenge is to detect how defective chips tend to spatially cluster on a wafer-a problem known as spatial pattern recognition. Recently, there has been a growing interest in mixed-type spatial pattern recognition-when multiple defect patterns, of different shapes, co-exist on the same wafer. Mixed-type spatial pattern recognition entails two central tasks: (1) spatial filtering, to distinguish systematic patterns from random noises; and (2) spatial clustering, to group filtered patterns into distinct defect types. Observing that spatial filtering is instrumental to high-quality mixed-type pattern recognition, we propose to use a graph-theoretic method, called adjacency-clustering, which leverages spatial dependence among adjacent defective chips to effectively filter the raw wafer maps. Tested on real-world data and compared against a state-of-the-art approach, our proposed method achieves at least 46% gain in terms of internal cluster validation quality (i.e., validation without external class labels), and about 5% gain in terms of Normalized Mutual Information-an external cluster validation metric based on external class labels. Interestingly, the margin of improvement appears to be a function of the pattern complexity, with larger gains achieved for more complex-shaped patterns.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it