Design and Characterization of low frequency Capacitive Micromachined Ultrasonic Transducer (CMUT)
Bibliographic record
Abstract
The CMUT devices presented in this paper were fabricated using a commercially available MEMSCAPs PolyMUMPs process. The moveable membrane evolves from the available single layer polysilicon. COMSOL simulations were used to model and investigate the effects of a 140 μm and 105 μm radius membranes that are 1.5 μm and 2 μm thick respectively. The results for two different structures designed to operate below 350 kHz are demonstrated in this work. Simulations show that both the devices presented show displacement of over 40 nm. The device snap shut was observed beyond 40 V. This frequency range is suitable to have high SNR and accurate distance measurements. Reducing the size of CMUT devices for the proposed frequency range was a challenge, sorted in this paper. A device capable to generate ultrasound close to 50 kHZ is also presented.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".