An 8 mW Fully Integrated Regenerative Resonant MEMS CO<sub>2</sub> Sensor Using Linear Polyethylenimine as a Capture Layer
Bibliographic record
Abstract
A fully integrated regenerative CO2MEMS sensor using a micro-resonator coated with Linear Polyethylenimine as an adsorbent layer is presented. The pyramidal cantilever micro-resonator used has a resonant frequency of 315.24 kHz with a Q factor of 1125 at atmospheric pressure. The micro-resonator was integrated with a sustaining amplifier that consumes 8 mW. The MEMS sensor sensitivity was characterized in a CO2concentration range from 1200 to 10500 ppm, showing a frequency shift of -12 Hz at 1200 ppm with a slope of -3.50 mHz / ppm over the characterized range. The adsorption and recovery times are characterized to be as low as 170 seconds and 280 seconds, respectively. The impacts of pressure, temperature and humidity on the sensor were also characterized. The behavior of the MEMS sensor is compared to that of an optical CO2sensor.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".