Mapping the growth of <i>p</i>-type GaN layer under Ga-rich and N-rich conditions at low to high temperatures by plasma-assisted molecular beam epitaxy
Bibliographic record
Abstract
We present a detailed study of Mg acceptor, p-type doping of GaN grown by plasma-assisted molecular beam epitaxy in both Ga-rich and N-rich conditions at low (∼580 °C) to high growth temperatures (∼740 °C). A growth map is constructed using results from a broad range of growth conditions, which shows the dependence of Mg incorporation and surface roughness on the III/V ratio and growth temperatures. Detailed secondary ion mass spectroscopy and atomic force microscopy studies confirmed that N-rich conditions are favorable for significantly higher Mg-incorporation efficiency (∼80%), whereas the Ga-rich growth condition is preferable for achieving a smooth surface morphology (root mean square roughness: ∼1–2 nm) with poor Mg incorporation. The room temperature Hall measurement confirms that the hole concentration in the range of ∼7 × 1017 to 2 × 1019 cm−3 can be achieved in Ga-rich and N-rich conditions, respectively, at a fixed Mg flux depending on the growth conditions. Our detailed study provides a proper guideline for realizing an efficient Mg-doped GaN layer and is applicable, in principle, to different nitride-based electronic and photonic devices.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".