TEMPERATURE REGULATED NONLINEAR MICROVALVES FOR SELF-ADAPTIVE MEMS COOLING
Bibliographic record
Abstract
In this paper, thermal buckling of doubly clamped microfabricated nickel beams is implemented as a passive actuation mechanism to drive temperature-regulated nonlinear micro-valves for adaptive microcooling applications. The nonlinear buckling phenomenon is combined with the nonlinear change in flow rate through parallel plates with a variable spacing. The thermal buckling mechanism and parallel plate flow are modeled analytically, and nondimensional characteristic design curves have been generated. Passive flow-control microvalves were fabricated using deep reactive ion etching and a through-mold nickel electroplating process over a thin sacrificial layer. The model is validated with experimental results from the microfabricated temperature-regulated microvalves. Experimental characterization using an integrated micromachined heat exchanger with air as the working fluid shows the desired nonlinear valving behavior with mass flow rates of up to 5 mg/s for a temperature increase of 50degC, corresponding to 0.25 W of heat removal. It is shown that temperature-induced elastic instabilities in microfabricated structures can be modeled and manipulated to create a nonlinear adaptive valving mechanism. The modeling approach, microfabrication process, and full characterization of the microvalves are presented.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".