OPTIMAL PARAMETERS FOR ARF LASER MICROMACHINING OF SiC AND PZT
Bibliographic record
Abstract
The ablation process has been characterized for a number of laser sources in silicon (Si) micromachining. However, very few results can be found in the literature for excimer laser technology at 193 nm on Si and even fewer for other materials. Moreover, most of the work has previously been reported for quasi-static conditions, not taking into account the movement of the sample relative to the laser beam. In order to globally consider the relative velocity of the sample with respect to the laser beam, a metric called Nppd (number of laser pulses deposited per beam diameter) is first defined in this work. Experimental results are presented to evaluate the micromachining performance of the excimer laser for three different materials (Si, PZT and Pyrex). Optimal parameters are obtained and then used to micromachine silicon carbide (SiC), in addition to the previous materials.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".