Growth and Characterisation of High Electron Mobility Transistors on 4H-SiC by Ammonia Molecular Beam Epitaxy
Bibliographic record
Abstract
The growth of GaN/AlGaN high electron mobility transistor structures (HEMT) on 4H-SiC by ammonia molecular beam epitaxy (a-MBE) is reported. Structures were grown using a magnetron sputter epitaxy deposited AlN buffer layer prior to the MBE growth of a carbon-doped insulating GaN isolation layer, undoped GaN channel layer and AlGaN cap layer. No ex-situ or in-situ high temperature pre-treatment of the SiC substrate was used. The electrical characteristics of the layers was excellent with RT mobilities of >1100 cm2/Vs for a sheet carrier density of >1 × 1013 cm—2. HEMTs fabricated from layers gave an ft and fmax of 36 and 80 GHz, respectively with a maximum saturated drain current of 450 mA/mm and transconductance of 160 mS/mm for a gate length of 0.3 μm.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".