Dynamics of MEMS-Based Angular Rate Sensors Excited via External Electrostatic Forces
Bibliographic record
Abstract
Abstract This paper investigates the dynamic behavior of rotating MEMS-based vibratory gyroscopes which employs a thin ring as the vibrating flexible element. The mathematical model for the MEMS ring structure as well as a model for the nonlinear electrostatic excitation forces are formulated. Galerkin’s procedure is employed to reduce the equations of motion to a set of ordinary differential equations. Understanding the effects of nonlinear actuator dynamics is considered important for characterizing the dynamic behavior of such devices. A suitable theoretical model to generate nonlinear electrostatic force that acts on the MEMS ring structure is formulated. Dynamic responses in the driving and the sensing directions are examined via time responses, phase diagram, and Poincare’ map plots when the input angular motion and the nonlinear electrostatic force are considered simultaneously. The analysis is envisaged to aid fabrication of this class of devices as well as for providing design improvements in MEMS Ring-based Gyroscopes.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".