AlN PEALD with TMA and forming gas: study of plasma reaction mechanisms
Bibliographic record
Abstract
The effect of deposition temperature and plasma dose on plasma-enhanced atomic layer deposition (PEALD) of AlN thin films with forming gas plasma and trimethylaluminum (TMA) has been studied. The temperature has a strong effect on TMA absorption considering the d-TMA absorptions at low deposition temperatures. The plasma effect on AlN growth was studied in terms of three aspects: (1) plasma effect on TMA absorption, (2) plasma effect on the insertion of plasma species and creation of chemical bonds with absorbed surface species, (3) plasma effect on the removal of organic ligands and weakly-bonded surface species. Plasma over-dosing and under-dosing not only affect the film growth rate but also the AlN film properties. A three-effect mathematical model of the plasma effect was built based on the three plasma effects, which is consistent with the AlN experimental growth results. The FTIR and dielectric studies of the PEALD AlN films support the model.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".