Magnetically-actuated dielectric cantilever RF MEMS switches
Bibliographic record
Abstract
Fully integrated novel magnetically-actuated dielectric cantilever MEMS switches suitable for high frequency RF applications are reported. A four-mask fabrication process has been developed to produce the MEMS switches with integrated current coils on both the substrate and the dielectric cantilever. The switches are actuated using an electromagnetic force and held in the DOWN state using an electrostatic force. DC actuation currents around 110 mA have been measured to be sufficient for operating the switch. The beam is maintained at DOWN state with the application of a potential difference as low as 24 V between the coils. In terms of the RF performance, the insertion and return losses are lower than -0.3 dB and -24 dB, respectively; and isolation is higher than 34 dB up to 10 GHz. To enhance the switch reliability, it is feasible to force the device into the UP state using a repulsive electromagnetic force in the case of release failure or stiction.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".