In Situ Doped Polysilicon (ISDP) Hydrophilic Direct Wafer Bonding for MEMS Applications
Why this work is in the frame
A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.
Bibliographic record
Abstract
In this paper, Chemical Mechanical Polishing is used to reduce RMS roughness of as-deposited ISDP from 3.2 nm down to 0.18 nm. This surface preparation allows ISDP thin films to be direct bonded to polycrystalline and monocrystalline Si, as well as thermal SiO 2 . Mechanically strong bondings are obtained showing surface energies higher than the Si fracture energy of 2250 mJ.m −2 and adherence energy up to more than 6000 mJ.m −2 after annealing at 1100 °C. Infrared images and Scanning Acoustic Microscopy confirm that ISDP can be used to fabricate void-free assemblies after annealing. The hermeticity analysis of cavities sealed by ISDP direct bonding showed maximum leak rate lower than 10 −11 Pa.m 3 s −1 after 18 weeks.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it