In Situ Doped Polysilicon (ISDP) Hydrophilic Direct Wafer Bonding for MEMS Applications
Bibliographic record
Abstract
In this paper, Chemical Mechanical Polishing is used to reduce RMS roughness of as-deposited ISDP from 3.2 nm down to 0.18 nm. This surface preparation allows ISDP thin films to be direct bonded to polycrystalline and monocrystalline Si, as well as thermal SiO 2 . Mechanically strong bondings are obtained showing surface energies higher than the Si fracture energy of 2250 mJ.m −2 and adherence energy up to more than 6000 mJ.m −2 after annealing at 1100 °C. Infrared images and Scanning Acoustic Microscopy confirm that ISDP can be used to fabricate void-free assemblies after annealing. The hermeticity analysis of cavities sealed by ISDP direct bonding showed maximum leak rate lower than 10 −11 Pa.m 3 s −1 after 18 weeks.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.003 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".