Silicon MEMS inertial sensors evolution over a quarter century
Why this work is in the frame
A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.
Bibliographic record
Abstract
Abstract Silicon-based microelectromechanical systems (MEMS) inertial sensors have become ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in several societal fields. Driven by consumer and automotive markets, companies involved in this technological development focused mostly on low cost, miniaturization and low power consumption, somewhat sacrificing measurement accuracy. In several laboratories all over the world, however, the research toward higher-performance sensors has been going on for more than two decades, with the goal of improving two key parameters for future applications: noise density and bias stability. This review article summarizes, for silicon-based MEMS accelerometers and gyroscopes, the most relevant working principles that appeared in the scientific literature. The collection of several data about the above mentioned key figures enables tracing the roadmap for further developments in the upcoming decade.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it