Competing tunneling conduction mechanisms in oxygen deficient Hf0.5Zr0.5O2
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Bibliographic record
Abstract
The direct control of the tunneling current as a function of electric polarization in ferroelectric tunnel junctions has recently attracted noticeable attention through the availability of the CMOS compatible ferroelectric hafnium zirconium oxide (Hf0.5Zr0.5O2). While a lot of progress has been made in the understanding of ferroelectric tunnel junctions, the control and optimization of the volume fraction of the polar orthorhombic phase are still in its infancy and raise the question whether all observed resistive switching events are necessarily associated with polarization reversal. Trap-assisted tunneling is also able to modulate the current density through a field-induced variation of the oxygen vacancy density across the tunnel junction. The amplitude of the effect should depend on the pre-existing density of oxygen vacancies introduced during the fabrication. Here, by controlling the oxygen partial pressure during the RF magnetron sputtering deposition of the non-polar monoclinic phase of Hf0.5Zr0.5O2 thin films of approximately 3 nm, we demonstrate tuning of its transport mechanism due to the formation of oxygen vacancies. We show that two mechanisms dominate the current transport depending on the average distance between traps. For large oxygen content in the Hf0.5Zr0.5O2 thin film, direct tunneling (DT) is the dominant transport mechanism, while the electrical conductivity in the oxide can be described by the phonon-assisted tunneling between traps (PATTs) for the oxygen deficient Hf0.5Zr0.5O2 thin film. We derive a critical inter-trap distance and a critical thickness value that explains the transition from DT to PATT mechanism in Hf0.5Zr0.5O2 thin films.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it