Flexible Polymer-based Capacitive Micromachined Ultrasound Transducers (polyCMUTs): Fabrication and Characterization
Bibliographic record
Abstract
Flexible components have always been an attraction in all engineering fields; ultrasound transducers are no exception to this. Capacitive micromachined ultrasound transducers (CMUTs) have started to challenge the piezoelectric dominance in ultrasound imaging industry due to their wider bandwidth and excellent integration with electronics. We present a new fabrication technique for making flexible polymer-based CMUTs that is simple, inexpensive, and robust. The proposed technique includes forming CMUT cells through four lithography steps on a polyimide substrate, and then chemically releasing it from the silicon carrier (by a sacrificial layer) to reduce residual stress. The fabricated 1D, 8-element flexible array showed similar resonant response at 5.8 MHz on flat and curved surfaces without compromising functionality. Our finite element analysis also confirmed the minimal change in resonant frequency. The proposed device could be used for conformal ultrasound imaging of anatomical features.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".