Solid-Liquid Interdiffusion Bonding between Ti/Ni/Ag/Sn Backside Metallized Si Chips and Cu/Al<sub>2</sub>O<sub>3</sub> - DBC Substrates with Au/Pd/Ni Surface Finish
Bibliographic record
Abstract
In recent years, solid-liquid interdiffusion bonding (SLID) had received much interest from semiconductor manufacturers, primarily due to its ability as a reliable die bonding method especially under high temperatures. This paper presented the work in the optimized Si/Ti/Ni/Ag/Sn bonded on DBC Al2O3/Au/Pd/Ni/Cu substrates by SLID in a vacuum environment. The diffusion phenomenon at the bonding interfaces was observed by SEM/EDX. Well-defined layered bond structures with excellent strength exceeding 7.91 MPa were achieved for the Au-Sn SLID system. Intermetallic compounds in the form of Ag3Sn, Ni3Sn4, and Ni3Sn2 were observed at the bonding interface between Si/Ti/Ni/Ag/Sn wafers and DBC substrates. Superior bond strength of the SLID system allows applications in die bonding that fulfill the requirements of commercial semiconductor packaging specifications.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".