Enhanced travel range bipolar tri-electrode electrostatic actuator using extended background electrode
Bibliographic record
Abstract
Electrostatic actuators have been widely employed in optical MEMS and adaptive optics systems. Tri-electrode electrostatic actuators that possess a perforated intermediate electrode between the MEMS and an underlying primary electrode, have been developed to reduce the needed control voltage. This configuration has previously been shown to improve the controllable range of motion of the MEMS an additional 60 - 70 % compared to a conventional parallel plate actuator. In this paper, the effect of extending the size of the primary electrode beyond the width of the MEMS device is studied. The presence of the intermediate electrode provides partial isolation for the MEMS, and results in an electric field from the extended primary electrode reaching the top surface of the MEMS. This enables a lifting force that counteracts the attraction force from below, thereby increasing the actuator’s controllable travel range. This effect is dependent on the size of the MEMS with respect to the spacing from the intermediate electrode (D1). Finite Element Method (FEM) along with restoring spring force method (RSFM) are employed to study the actuator performance. The extended configuration is studied in a narrow MEMS device (with width 16D1) and a very narrow device (cantilever type width 6.5D1) to explore the travel range extension as a function of MEMS device size. The travel range before snap down of the narrow actuator with extended electrode showed an improvement of over 80% to that of a conventional electrostatic actuator, while the very narrow MEMS achieved 2.3 times more controllable travel distance.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".