Bibliographic record
Abstract
Time- and space-resolved optical emission spectroscopy and fast imaging were used for the investigation of the plasma dynamics of high-power impulse magnetron sputtering discharges. 200 μs pulses with a 50 Hz repetition frequency were applied to a Cr target in Ar, N2, and N2/Ar mixtures and in a pressure range from 0.7 to 2.66 Pa. The power density peaked at 2.2–6 kW cm−2. Evidence of dominating self-sputtering was found for all investigated conditions. Up to four different discharge phases within each pulse were identified: (i) the ignition phase, (ii) the high-current metal-dominated phase, (iii) the transient phase, and (iv) the low-current gas-dominated phase. The emission of working gas excited by fast electrons penetrating the space in-between the electrodes during the ignition phase spread far outwards from the target at a speed of 24 km s−1 in 1.3 Pa of Ar and at 7.5 km s−1 in 1.3 Pa of N2. The dense metal plasma created next to the target propagated in the reactor at a speed ranging from 0.7 to 3.5 km s−1, depending on the working gas composition and the pressure. In fact, it increased with higher N2 concentration and lower pressure. The form of the propagating plasma wave changed from a hemispherical shape in Ar, to a droplike shape extending far from the target in N2. An important N2 emission rise in the latter case was detected during the transition at the end of the metal-dominated phase.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.001 |
| Meta-epidemiology (narrow) | 0.002 | 0.001 |
| Meta-epidemiology (broad) | 0.003 | 0.002 |
| Bibliometrics | 0.003 | 0.005 |
| Science and technology studies | 0.002 | 0.002 |
| Scholarly communication | 0.007 | 0.003 |
| Open science | 0.006 | 0.005 |
| Research integrity | 0.007 | 0.004 |
| Insufficient payload (model declined to judge) | 0.909 | 0.917 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; the direct Gemma label and the distilled Codex classifier agree on what is shown here.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".