Process specification language for management of MEMS device development - a step towards standardisation
Bibliographic record
Abstract
The micro-electro-mechanical systems (MEMS) field has transferred many products from emergent to established technologies in the commercial world. However, many products remain under development for significant lengths of time, facing various challenges along the way. One of the most critical challenges is the lack of standardised terminology for process specification. This paper provides a foundation for formally describing the set of activities related to managing the manufacturing processes used by the MEMS community. First, we develop new taxonomic levels of abstraction for MEMS processes. We then use logic foundations provided in international standard ISO-18621-1 to develop a methodology that allows designers and product developers to remove ambiguities and misconceptions when exchanging information about MEMS manufacturing processes. A case study is presented where our methodology is applied to generate Extensive Markup Language (XML) code to capture the processes' structure and critical information.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.019 | 0.017 |
| Meta-epidemiology (narrow) | 0.002 | 0.002 |
| Meta-epidemiology (broad) | 0.001 | 0.003 |
| Bibliometrics | 0.003 | 0.003 |
| Science and technology studies | 0.002 | 0.003 |
| Scholarly communication | 0.008 | 0.009 |
| Open science | 0.004 | 0.003 |
| Research integrity | 0.004 | 0.009 |
| Insufficient payload (model declined to judge) | 0.004 | 0.003 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".