A parallel-plate MEMS variable capacitor with vertical thin-film comb actuators
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Bibliographic record
Abstract
A novel parallel-plate MEMS variable capacitor with a thin-film vertical comb actuator is proposed. The actuator can vertically displace both plates of the capacitor. Making use of the fringing field, this actuator exhibits linear displacement behavior, caused by the induced electrostatic force between the actuator's electrodes. The proposed capacitor has a low parasitic capacitance and linear capacitance response versus bias voltages due to the plates that are mechanically connected to the actuator which is electrically isolated from the capacitor's parallel-plates. The tuning range is measured and found to be 7:1 at 1 GHz. The fabricated MEMS variable capacitor exhibits a self-resonance frequency of 9 GHz at zero <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DC</i> bias voltage.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it