Design of MEMS magnetic actuator for MEMS fourier transform infrared spectrometer
Bibliographic record
Abstract
The objective of this thesis is to design MEMS magnetic actuator for MEMS FTIRS. The actuator consists of moving part and fixed part. The moving part uses rotation-to-translation motion conversion mechanism to achieve large translation, which includes four trapezoidal plates, central ring, anchoring springs and connection springs. The fixed part of the actuator consists of four solenoids. The actuator can be integrated with separately fabricated micromirror plate to achieve high surface quality translation micromirror for FTIRS. The actuator is capable of eliminating titling by controlling the four solenoids individually. The MEMS magnetic actuator has been designed and simulated to be able to output a static displacement of 370micrometers. The stress has been analyzed for the moving part of the actuator. The actuator fixed part has been designed. Dynamic analysis has been conducted for the moving part of the actuator. The moving part of the actuator has been fabricated using MetalMUMPs.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".