Influence of Different Carbon Precursors on Optical and Electrical Properties of Silicon Carbonitride Thin Films
Bibliographic record
Abstract
We investigate the thin film properties of the amorphous hydrogenated silicon carbonitride (a-SiCN:H) deposited by the electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR PECVD) technique. The elemental composition, film density, and complex refractive index of the SiCN films were analyzed as functions of hydrocarbon precursors’ (acetylene (C 2 H 2 ) or methane (CH 4 )) flow rates. The difference in the reactivity and hydrogen content of the carbon precursors influence the thin film properties. The highest breakdown voltage obtained from our thin films was 29 V. Preliminary results of nanoindentation of the thin films are also presented in order to compare the hardness performance of the thin films obtained by different carbon sources.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".