Molecular Beam Epitaxy of AlGaN Epilayers on Si for Vertical Deep Ultraviolet Light-Emitting Diodes
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Bibliographic record
Abstract
Silicon (Si) has been an appealing substrate for vertical aluminum gallium nitride (AlGaN) deep ultraviolet (UV) light-emitting diodes (LEDs), toward which, the first step is to demonstrate AlGaN deep UV LEDs on Si. Nonetheless, the epitaxy of AlGaN epilayers on Si remains a challenge. Herein, we demonstrate the molecular beam epitaxy of AlGaN epilayers on Si using a nanowire-based template over a wide Al content range from 35%–70%. Smooth AlGaN surface down to a rms roughness of 0.4 nm is obtained using this approach. Vertical AlGaN deep UV LEDs emitting down to 247 nm are also demonstrated.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it