Vertical Electrostatic MEMS Aligner with Integrated Silicon Nitride Optical Waveguides
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Bibliographic record
Abstract
This work proposes an electrostatic MEMS aligner with the capability of integrating optical waveguides onto its suspended mechanical structure. The proposed aligner, which has a structural silicon layer of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$59\ \mu \mathrm{m}$</tex> , is anchored at two distinct points by a series of low stiffness beams along the anchors axis. A comb drive, upon excitation, can rotate the edge of the aligner vertically toward a point away from the substrate. Therefore, the vertical position of the integrated waveguide can be changed. The behavior of the aligner is studied by simulation and experimental measurements. The experimental results indicate that the aligner can eliminate the initial misalignment of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$0.350\ \mu \mathrm{m}$</tex> between two integrated waveguides, i.e., one fixed and another moveable, when it is excited with a 90 V DC voltage. As a result, the optical insertion loss is reduced by an average of 3 dB in the wavelength range of 1575 nm to 1605 nm.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it