Thermally induced surface faceting on heteroepitaxial layers
Bibliographic record
Abstract
Heteroepitaxial semiconductors such as Ge-on-Si are widely used in current opto-electronic and electronic applications, and one of the most important challenges for epitaxial Ge-on-Si is threading dislocations (TDs) in Ge layers caused by lattice mismatch between Ge and Si. Here, apart from traditional wet chemical etching, we report a convenient approach to evaluate the threading dislocation densities in heteroepitaxial layers through vacuum thermal annealing. More importantly, the controversial origin of thermal annealing induced pits on a Ge surface was addressed in this work. By combining both experiments and density functional theory (DFT) calculations, we find that the {111} facets defined thermal pits on Ge (001) surfaces are mainly caused by threading dislocation activation. Ge adatoms at the TD segments sublimate preferentially than the ones on dislocation-free Ge (001) surface regions, and its further evolution is determined by surface energies of {111} facets, leading to a construction of inverted pyramid-shaped thermal pits.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".