Improving Fabrication Fidelity of Integrated Nanophotonic Devices Using Deep Learning
Bibliographic record
Abstract
High Resolution Image Download MS PowerPoint Slide Next-generation integrated nanophotonic device designs leverage advanced optimization techniques such as inverse design and topology optimization, which achieve high performance and extreme miniaturization by optimizing a massively complex design space enabled by small feature sizes. However, unless the optimization is heavily constrained, the generated small features are not reliably fabricated, leading to optical performance degradation. Even for simpler, conventional designs, fabrication-induced performance degradation still occurs. The degree of deviation from the original design depends not only on the size and shape of its features but also on the distribution of features and the surrounding environment, presenting a complex, proximity-dependent behavior. Without proprietary fabrication process specifications, design corrections can only be made after calibrating fabrication runs take place. In this work, we introduce a general deep machine learning model that automatically corrects photonic device design layouts prior to first fabrication. Only a small set of scanning electron microscopy images of engineered training features are required to create the deep learning model. By making corrections to the design layout, the fabricated structure more closely aligns with the original intended design and therefore results in improved optical performance. Without modifying the nanofabrication process, adding significant computation in design, or requiring proprietary process specifications, we believe that our model opens the door to new levels of reliability and performance in next-generation photonic circuits.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".