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Record W4383817153 · doi:10.1116/6.0002830

Low-temperature, single-source, chemical vapor deposition of molybdenum nitride thin films

2023· article· en· W4383817153 on OpenAlexafffund
Michael A. Land, Justin Lomax, Seán T. Barry

Bibliographic record

VenueJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2023
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsWestern UniversityCarleton University
FundersNatural Sciences and Engineering Research Council of Canada
KeywordsX-ray photoelectron spectroscopyMolybdenumChemical vapor depositionNitrideSubstrate (aquarium)Thin filmMaterials scienceAnalytical Chemistry (journal)Deposition (geology)DiffractionCarbon nitrideLayer (electronics)ChemistryChemical engineeringNanotechnologyMetallurgyOpticsOrganic chemistryCatalysisPhotocatalysis

Abstract

fetched live from OpenAlex

The 1,4-di-tert-butyl-1,3-diazabutadiene adduct of bis(tert-butylimido)dichloro-molybdenum(VI), (tBuN)2MoCl2⋅dad, was used as a single-source precursor for the chemical vapor deposition of molybdenum nitride from 350–600 °C. Deposition at 400 °C had a growth rate of 55 nm h−1 and was comprised of a mixture of Mo2N and MoN, based on x-ray photoelectron spectroscopy and grazing-incidence x-ray diffraction results. The films are essentially featureless and are as smooth as the underlying substrate, based on atomic force microscopy measurements. Because the depositions could be carried out at a low temperature, there was minimal carbon (1.4%) inclusion in the film as shown by XPS.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.004
Threshold uncertainty score0.770

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0010.002
Science and technology studies0.0000.001
Scholarly communication0.0000.001
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.009
GPT teacher head0.219
Teacher spread0.210 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations8
Published2023
Admission routes2
Has abstractyes

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