Study of Imprint dynamics in CMOS compatible HZO ferroelectric capacitors
Bibliographic record
Abstract
The discovery of the ferroelectric orthorhombic phase in doped HfO2 gave a major boost to the interest for integrated ferroelectric oxides in the CMOS industry [1]. Given its low crystallisation temperature the Hf1-xZrxO2 solid solution (x = 0.5), i.e Hf0.5Zr0.5O2 (HZO) is an excellent candidate for both front and back-end of line integration of ferroelectric Non-Volatile Memories (NVM) or artificial synapses [2]. Although promising demonstrations of have been disclosed, achieving a stable cycling with minimum imprint behavior remains a significant challenge [3]. Imprint induces as a shift of the Polarization-Voltage (P-V) curve along the voltage axis during a retention stage. The direction in which the hysteresis curve is shifted is dictated by the stored polarization state which can in turn lead to a failure during read operation. In this work, imprint dynamics is studied from 1µs up to 104s in 10nm HZO capacitors with TiN electrodes through a dedicated experimental protocol. In addition, imprint was also investigated on intermediate polarization states. It is shown that P-V curves exhibited a neck suggesting a local rearrangement of electric charges and polarization within ferroelectric domains and/or grains.References: [1] T. S. Böscke et al., Applied Physics Letters, 99, p. 102903, (2011)[2] B. Manchon et al., Physica Status Solidii (RRL), 16, p. 2100585, (2022).[3] J. Bouaziz et al., Applied Physics Letters, 118, p. 082901, (2021)
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.004 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".