Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching
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Bibliographic record
Abstract
This work demonstrates a hybrid MEMS actuator platform that combines electrostatic and piezoelectric actuators to displace a suspended MEMS platform along 3 degrees-of-freedom (DOF). The prototype MEMS actuator tested produces maximum displacements of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$8.8 \mu \text{m}$ </tex-math></inline-formula> along the positive X-axis, and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$8.5 \mu \text{m}$ </tex-math></inline-formula> along the negative X-axis, with digital control. Analog control produces maximum displacements of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$5.9 \mu \text{m}$ </tex-math></inline-formula> along the positive X-axis, and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$5.8 \mu \text{m}$ </tex-math></inline-formula> along the negative X-axis. It can also provide <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$2.2 \mu \text{m}$ </tex-math></inline-formula> of in-plane displacement along the negative Y-axis with analog control. The electrostatic actuator used for displacement along the negative Y-axis also compensates for any out-of-plane misalignment between the suspended MEMS platform and fixed silicon due to the significant residual stress caused by deposited piezoelectric material layers. In addition, up to 550 nm of misalignment compensation using the electrostatic actuator before electrostatic pull-in is demonstrated. The piezoelectric actuator provides fine alignment capability with a maximum out-of-plane displacement of 200 nm and 100 nm with analog control along the positive and negative Z-axis, respectively. This hybrid MEMS actuator can be integrated with channel waveguides for efficient planar optical switching applications. [2023-0121]
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it