A Correlative Study of Silicon Carbide Power Devices Using Atom Probe Tomography and Transmission Electron Microscopy
Bibliographic record
Abstract
Abstract Atom probe tomography is used to characterize the 3D Al dopant distribution within the gate diffusion region of a deconstructed SiC n-channel junction field effect transistor. The data reveals extensive inhomogeneities in the dopant distribution, which manifests as large Al clusters - some of which are ring-shaped and indicative of dopant segregation to lattice defects in the SiC. The presence of defects in the SiC is confirmed by transmission electron microscopy of an identical region. Factors that may impact the atom probe data quality and consequently complicate data interpretation are considered, and their severity evaluated. The possible origin of the lattice defects in the SiC and the corresponding implications for device performance and reliability are also discussed. Overall, the utility of atom probe tomography and correlative transmission electron microscopy for revealing potential failure mechanisms of next-generation semiconductor devices is demonstrated.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".