Low Temperature Direct Bonding of Ge Chips with DBC Alumina Substrates using Ag Nanotwinned Films
Bibliographic record
Abstract
Epitaxial Ag nanotwinned films with highly (111)preferred orientation were deposited by magnetron sputtering onto germanium substrates, some with the addition of a Ti layer and application of negative substrate bias.A high density of Ag nanotwins with an average twin spacing of 2.18 nm formed in the Ag columnar structures.Twin boundaries formed along the direction perpendicular to the growth direction of the film.The influences of the Ti interlayer and negative substrate bias on the formation of Ag nanotwins were also examined.The highly (111)-textured thin films had an impressive film surface roughness, as low as 11.2 nm.The (111)-oriented nanotwins provided higher surface diffusivity than did other orientations.The electrical resistivity decreased significantly as more ( 111)oriented nanotwinned structures formed.The bonding experiment was also performed at 200 ℃ for 60 min at a bonding pressure of 20 MPa, and extremely rare voids appeared at the bonding interface.The combination of low surface roughness, rapid diffusivity on the (111)-planes, and lower electrical resistivity present a high possibility of reliable interconnections for future microelectronic technology via direct bonding.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".