Deposition of TiC Film by Surface Wave Plasma with Titanium Counter Electrode
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Bibliographic record
Abstract
TiC films were prepared by a process that combines microwave plasma CVD with a sputtering method using titanium electrode to improve film deposition speed. The film depositions were carried out while changing the substrate bias voltage to 0, −200, and −400 V. The flow rate of CH4 gas was performed under three conditions of 2.0, 1.0, and 0 sccm. By applying the substrate bias voltage, titanium oxide was easily deposited and the film hardness was lowered. The film hardness was high in the specimens without the substrate bias voltage, and the maximum hardness was 22 GPa. The maximum film deposition speed was 24 µm/h.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it