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Record W4403584334 · doi:10.1021/acs.inorgchem.4c03416

Silyl- and Germyl-Substituted Boranes: Synthesis and Investigation as Potential Atomic Layer Deposition Precursors

2024· article· en· W4403584334 on OpenAlexafffund
Majeda Al Hareri, Patricio E. Romero, James F. Britten, David J. H. Emslie

Bibliographic record

VenueInorganic Chemistry · 2024
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsMcMaster University
FundersNatural Sciences and Engineering Research Council of CanadaOntario Research FoundationIntel CorporationSemiconductor Research Corporation
KeywordsChemistryBoranesSilylationLayer (electronics)Atomic layer depositionDeposition (geology)Organic chemistryBoronCatalysis

Abstract

fetched live from OpenAlex

Boranes featuring bulky hypersilyl or supersilyl groups and/or sterically unencumbered trimethylgermyl substituents were synthesized for investigation as potential precursors for atomic layer deposition (ALD) of elemental boron. The envisaged ALD process would employ a boron trihalide coreactant, exploiting the formation of strong silicon-halogen and germanium-halogen bonds as a driving force. The alkali metal silyl and germyl compounds hypersilyl lithium, {(Me 3 Si) 3 Si}Li(THF) 3 ( 1 ), supersilyl sodium, ( t Bu 3 Si)Na(THF) n ( 2, n = 2–3), and trimethylgermyl lithium, {Me 3 GeLi(THF) 2 } 2 ( 3 ), were used for the synthesis of the silyl- and germyl-substituted boranes in this work. Compounds 1 and 2 were synthesized as previously reported, and compound 3 was isolated from the reaction of trimethylgermane with tert -butyl lithium. Compounds 2 and 3 were crystallographically characterized. Reaction of B(NMe 2 )Cl 2 with 2 equiv of 1 afforded previously reported {(Me 3 Si) 3 Si} 2 B(NMe 2 ) ( 4 ), whereas reactions of B(NMe 2 )Cl 2 or {B(NMe 2 )F 2 } 2 with excess 2 only afforded the monosilyl boranes ( t Bu 3 Si)B(NMe 2 )X {X = Cl ( 5 ) and F ( 6 )}. Reaction of 5 with 0.5 equiv of {Me 3 GeLi(THF) 2 } 2 ( 3 ) provided the first example of a mixed silyl/germyl-substituted borane, ( t Bu 3 Si)(Me 3 Ge)B(NMe 2 ) ( 7 ). Attempts to synthesize (Me 3 Ge) 2 B(NMe 2 ) from the 1:1 reaction of B(NMe 2 )Cl 2 with {Me 3 GeLi(THF) 2 } 2 afforded a mixture of two major products, one of which was identified as the tri(germyl)(amido)borate {(Me 3 Ge) 3 B(NMe 2 )}Li(THF) 2 ( 8 ); compound 8 was isolated from the 1:1.5 reaction. Reaction of more sterically encumbered B(TMP)Cl 2 with 1 equiv of {Me 3 GeLi(THF) 2 } 2 afforded the di(germyl)(amido)borane (Me 3 Ge) 2 B(TMP) ( 9 ). Boranes 4, 7, and 9 and borate 8 were crystallographically characterized. The thermal stability and volatility of boranes 4, 7, and 9 was evaluated, the solution reactivity of 4 and 7 with boron trihalides was assessed, and ALD was attempted using 4 in combination with BCl 3 and BBr 3 at 150 and 300 °C.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.005
Threshold uncertainty score0.567

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.006
GPT teacher head0.192
Teacher spread0.186 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations1
Published2024
Admission routes2
Has abstractyes

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