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Characterization of Thermally Driven V -shaped MEMS Actuator Using an Alternate Nonlinear RC Model

2024· article· en· W4405755083 on OpenAlexaff
Nidal A. Sherif, Rached Dhaouadi, Maher Bakri-Kassem

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsUniversity of Waterloo
Fundersnot available
KeywordsActuatorMicroelectromechanical systemsCharacterization (materials science)Nonlinear systemNonlinear modelMaterials scienceControl theory (sociology)Electronic engineeringComputer scienceEngineeringOptoelectronicsPhysicsElectrical engineeringNanotechnologyArtificial intelligence

Abstract

fetched live from OpenAlex

This paper presents a reduced and efficient alternate model to simulate the nonlinear dynamics of a thermally driven V-shaped MEMS actuator. The experimental observation of the dynamic voltage-displacement relationship shows an overdamped response with a variable rise-time and fall-time indicating the simultaneous presence of complex energy storage and energy dissipation mechanisms. To completely characterize these mechanisms and yet have a simple representation for control, we develop an alternate model consisting of a set of ordinary nonlinear differential equations representing the behavior of a nonlinear RC circuit with variable parameters that are a function of the applied voltage. The simulation results show good agreement with the measured data and confirm the accuracy of the proposed alternate model.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.003

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.025
GPT teacher head0.261
Teacher spread0.236 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations0
Published2024
Admission routes1
Has abstractyes

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