Wafer-scale mapping of carrier density and mobility with terahertz time-domain ellipsometry
Bibliographic record
Abstract
Terahertz (THz) measurements are increasingly valued for nondestructive testing of materials in power devices and other applications. Hence, there is a growing demand for highly accurate characterization methods in the THz range. Here we demonstrate the application of THz time-domain ellipsometry (THz-TDE) to large-scale, quantitative mapping of semiconductor wafers. While THz-TDE is an established technique, its application in wafer-scale mapping, which is an important process in the semiconductor industry, has not yet been demonstrated. In this work, we highlight the effectiveness of THz-TDE by mapping the electrical properties of a widely used semiconductor, silicon carbide (SiC). Spatial distribution maps of conductivity, carrier density, and mobility of a commercial 4-in. SiC wafer are derived using the measured ellipsometric parameters. THz-TDE mapping offers a nondestructive, contactless testing method to evaluate semiconductor quality and electrical homogeneity and is notably suitable for doped semiconductors characterized by high THz absorption.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".