Development of a Current-Position Control Strategy for Motion Systems Utilizing Nonlinear Reluctance Actuators
Bibliographic record
Abstract
Reluctance actuators (RA) can replace the current Lorentz actuators in the next generation of positioning and scanning motion systems, such as the wafer stage in lithography machines. However, the nonlinear output force characteristic and the gap dependency of the RA are the main challenges in using the RA to drive motion systems. In this paper, we design a two-loop control approach for a reluctance actuator motion system (RAMS) to achieve tracking performance for a desired motion profile. First, the current control loop linearizes the RA under different conditions. Next, the position control loop is designed using a PID control based on an extended-high gain observer to achieve a desired motion profile considering unknown dynamics in the system. The simulation results show the efficiency of the proposed current control in linearizing the dynamic behavior under different desired forces and nominal air gaps and achieving a frequency response similar to the spring-mass-damper system. Moreover, the position control can achieve different long-stroke and short-stroke motion profiles with different amplitudes and ranges of motion.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.001 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".