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Record W4409270378 · doi:10.1063/5.0253997

Phase formation prediction in magnetron sputtered Cu(Ti)Zn thin films: Numerical vs experimental approaches

2025· article· en· W4409270378 on OpenAlexaff
Dimitri Boivin, Andrea Jagodar, Pascal Brault, Thomas Vaubois, Edern Menou, Barthélemy Aspe, Amaël Caillard, Pascal Andreazza, Marjorie Cavarroc, Anne‐Lise Thomann

Bibliographic record

VenueJournal of Applied Physics · 2025
Typearticle
Languageen
FieldEngineering
TopicMetal and Thin Film Mechanics
Canadian institutionsSafran Electronics (Canada)
Fundersnot available
KeywordsMaterials scienceThin filmCavity magnetronSputter depositionPhase (matter)MetallurgyCopperSputteringChemistryNanotechnology

Abstract

fetched live from OpenAlex

In this work, we evaluated the ability of three numerical methods to predict the phase formation in Cu–Zn binary and Cu–Ti–Zn ternary alloy thin films deposited by DC-magnetron sputter deposition. Molecular dynamics (MD) simulations were carried out to simulate the growth of the alloy film and study the organization at the atomic level. A Machine Learning (ML) approach trained with a recently published bulk HEA (high-entropy alloy) database was used to determine the presence of an amorphous phase, solid solutions, or/and intermetallics. Finally, CALPHAD (CALculation of PHAse Diagrams) thermodynamic modeling allows one to simulate the phase diagrams. Crystalline phases formed in experimental films were investigated by grazing incidence x-ray diffraction (GIXRD). Comparison with CALPHAD results highlights that for pure Ti or binary Cu–Zn films, the thermodynamically stable phases are formed in the films. Less agreement was found at low or high percentage of Ti introduced in the Cu–Zn system, and drastic differences were observed for elemental compositions close to equimolarity. In those cases, the out of equilibrium nature of the magnetron sputtering deposition technique is evidenced. The very limited agreement between the GIXRD and ML approach is explained by the available database, which is exclusively based on bulk alloys. Elemental composition of the alloy does not itself determine the stabilized phases: elaboration techniques are to be taken into account too. MD simulations bring information on a possible segregation of the Zn element to the surface and grain boundaries. A very good agreement is evidenced between the calculated and experimental diffraction patterns.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Simulation or modeling · Consensus signal: Simulation or modeling
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.003
Threshold uncertainty score0.005

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.001
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0010.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.022
GPT teacher head0.231
Teacher spread0.209 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designSimulation or modeling
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations4
Published2025
Admission routes1
Has abstractyes

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