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Record W4409469096 · doi:10.1088/1361-6641/adccf2

Investigation of terbium-doped silicon oxide thin films: comparison of TEM images prepared by FIB and mechanical methods

2025· article· en· W4409469096 on OpenAlexafffund
Parnia Badkoubeh Hezaveh, Peter Mascher, Zahra Khatami

Bibliographic record

VenueSemiconductor Science and Technology · 2025
Typearticle
Languageen
FieldEngineering
TopicSemiconductor materials and devices
Canadian institutionsMcMaster UniversityUniversity of New Brunswick
FundersNatural Sciences and Engineering Research Council of CanadaNew Brunswick Innovation Foundation
KeywordsTerbiumDopingMaterials scienceSiliconOxideSilicon oxideThin filmNanotechnologyOptoelectronicsMetallurgySilicon nitrideLuminescence

Abstract

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Abstract This study characterizes the optical and structural properties of terbium-doped oxygen-rich silicon oxide (ORSO:Tb) thin films and investigates focused ion beam (FIB)-induced damage on transmission electron microscopy (TEM) lamellae prepared from these films. While there are significant advantages to the FIB technique, there is a potential that energetic ions used during the FIB process can damage the lamellae. A comparative analysis of TEM images obtained using FIB and conventional mechanical preparation methods was performed. The results indicate that TEM images of FIB-prepared lamellae exhibit higher resolution, allowing for a more detailed examination of nanocrystal structures and quantum dots. In contrast, the lack of sufficient clarity of the mechanically prepared TEM images reduces the number of nanocrystals visible in the field of view, resulting in a less effective and detailed study of the thinned films. We found no evidence of Ga implantation or mixing into the thinned film, and no observable FIB-induced damage such as recrystallization, or amorphization. Photoluminescence spectra exhibited red and blue shifts with increasing annealing temperature at blue and green emissions, respectively. X-ray diffraction patterns verify that the formation of crystalline nanostructures begins at 1100 °C, and at least at 1200 °C, two phases of Tb4Si3(SiO4)O10 and Tb2O3 in the sample are recognized.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.002
Threshold uncertainty score0.006

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0020.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.018
GPT teacher head0.304
Teacher spread0.286 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

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Citations0
Published2025
Admission routes2
Has abstractyes

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