An Adaptive Fault Detection Strategy for Cz Crystal Growth Process
Bibliographic record
Abstract
The monitoring and fault detection for the Czochralski (Cz) crystal growth process is important to ensure the quality of the produced mono-crystalline silicon. The Cz process is a typical multi-modes industrial process, which makes the detection difficult in distinguish the change caused by the fault or mode switching. In this paper, an adaptive fault detection strategy for Cz crystal growth process is proposed. Firstly, quality-related variables are selected from numerous process variables, based on which the training dataset is constructed. Then, a fault detection model is built based on slowly-varying feature and statics indicator. A model switching strategy and updating algorithm are designed to handle the abnormal situation caused by the mode switching or fault occurrence. Three representative experiments are conducted to verify the performance of the proposed strategy, including numerical cases, a publicly available dataset, and Cz crystal growth process from our laboratory.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.001 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".