<i>In situ</i> metal organic chemical vapor deposition of ultrathin sp2-bonded boron nitride dielectric on gallium nitride
Bibliographic record
Abstract
Boron nitride (BN) is one of the best dielectric materials for two-dimensional materials due to its van der Waals bonding, ultrawide bandgap, and dielectric and breakdown properties. For conventional semiconductors materials, such as GaN, BN may offer many of these same advantages. Here, we report on in situ metal organic chemical vapor deposition of few nanometer thick sp2-bonded BN on GaN and AlGaN/GaN structures. To achieve high-quality BN/GaN interfaces, growth temperature and time were optimized to achieve thin and smooth BN layers with minimal impact on the GaN layer. At a growth temperature of 1060 °C for 15 min, continuous 4 nm thick BN layers with surface roughness as low as 0.35 nm were achieved. Current-voltage (IV) measurements of BN on n-type GaN metal-insulator-semiconductor (MIS) diodes showed significantly reduced reverse leakage and lower ideality factors compared to Ni/GaN Schottky diodes. From capacitance-voltage (CV) measurements, a built-in voltage of ∼2.2 V was measured, which is consistent with the BN/GaN band offset determined by x-ray photoelectron spectroscopy. The deposition of BN on AlGaN/GaN structures showed minimal degradation of the two-dimensional electron gas transport properties. IV and CV measurements of BN/AlGaN/GaN MIS diodes showed a 3600 times reduction in the reverse leakage current compared to a standard Schottky and had hysteresis less than 0.1 V.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.002 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".