Design, Fabrication, and Characterization of Dual-Electrode Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Geometries
Bibliographic record
Abstract
Piezoelectric micromachined ultrasonic transducers (PMUTs) traditionally operate at a single frequency, requiring physical modifications to alter their operational frequency. In ultrasonic applications such as diagnostic imaging, the working frequency is critical in determining resolution and detection range. Dual-electrode PMUTs present a promising alternative to conventional designs, enabling multi-frequency operation by activating distinct resonant modes through tailored electrode configurations and actuations. This study details the design, fabrication, and characterization of three dual-electrode PMUT geometries: circular, square, and rectangular membranes. Fabricated using the PiezoMUMPs process, these geometries feature identical material properties and membrane areas. Their electromechanical performance was evaluated through finite element simulations and experimental methods, focusing on metrics such as electromechanical coupling coefficient (EMCC), resonant frequencies, and membrane displacement. A comparative performance analysis across the geometries is presented. Multi-frequency operation was achieved using a dual-electrode configuration with an outer ring electrode and an inner disk electrode, allowing independent activation of two resonant modes. These findings highlight the potential of dual-electrode PMUTs to enhance multi-frequency operation, especially in ultrasonic imaging and related applications.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".