INTEGRATION OF GRAPHENE-POLYMER HETEROSTRUCTURE MEMBRANES INTO A MULTI-USER MEMS FABRICATION PROCESS
Bibliographic record
Abstract
Graphene-polymer heterostructure (GPH) membranes are an emerging high-performance option for MEMS.Here we demonstrate for the first time how GPH membranes can be integrated into commercial multiuser MEMS fabrication using the PiezoMUMPs process, to create capacitive pressure sensors and CMUTs.The pressure sensors demonstrate a linear areal sensitivity of 32 Pa -1 mm -2 over a dynamic range of 200 kPa.The CMUTs possess 9.6 MHz resonance frequency and Q factor of 10 under a bias of 2 V, which is ideal for medical and non-destructive testing applications.This is the first demonstration of an industry-standard process for the fabrication of graphene-based MEMS devices.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".