Selective formation of SiC micropatterns by scratching-patterned electrochemical etching
Bibliographic record
Abstract
A simple strategy for fabricating SiC microstructures and micropatterns is demonstrated based on scratching-patterned electrochemical etching, where the main processes only include surface scratching with a diamond tip and electrochemical etching using hydrofluoric (HF) acid. The prepared micropatterns were characterized by scanning electron microscopy (SEM) and confocal microscopy to evaluate the surface morphology and microstructures, while atomic force microscopy (AFM) was applied to explore the role of different applied forces. A formation mechanism is proposed by both experimental and simulation analysis through transmission electron microscopy (TEM) and COMSOL modeling, from which a reliable formation mechanism is constructed. In general, this study contributes to extending the microfabrication processes and techniques of SiC, and shows a bright potential in fabrication of microstructures and devices such as optoelectronics and micro-electromechanical systems (MEMS).
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".