A Method for Expanding the Bandwidth and Decreasing the Actuation Voltage of CMUT Devices
Bibliographic record
Abstract
[Figures/graphical abstract.pdf] This paper presents a novel capacitive micromachined ultrasonic transducer (CMUT) fabricated with the MEMSCAP PolyMUMPs process and incorporating two new design elements: spring arms and rocker stems. The structure enables low-Q-factor, broadband operation in a commercial surface-micromachining technology, making it suitable for air-coupled applications. The device operates at a bias voltage as low as 26 V, which is advantageous for portable systems. Electrical characterization demonstrates a <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$6.5\times$</tex-math></inline-formula> reduction in bias voltage compared with traditional designs. Four CMUTs were fabricated to isolate and assess the influence of each design element. The frequency spectra showed that the device with the novel design features had the broadest bandwidth (a <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$Q$</tex-math></inline-formula>-factor of approximately 1.2 compared to approximately 34 for the traditional design). These results highlight the potential of the proposed CMUT architecture for high axial resolution pulse-echo systems.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".