Rapid Thermal Anneal with Conductive Heating for SiC Contact Formation
Bibliographic record
Abstract
This paper explains the potential of a heat conduction based RTA (Rapid Thermal Anneal) system (Levo) to overcome the main shortcomings of conventional lamp heated tools systems for silicide top contact anneal during SiC MOSFET device fabrication. The advantage of conductive heating is that the radiation-related properties, like transparency of the wafer, does not play a role, and consequently, that the whole rapid thermal anneal becomes independent of wafer type. In this study SiC wafers and Si wafers (both 200mm) were annealed consecutively without any system adjustment. The silicon wafers were used to qualify the process (contamination / within-wafer uniformity and wafer-to-wafer repeatability).
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".