Amorphous Pb(Zr,Ti)O<sub>3</sub> Thin Films for Efficient Piezoelectric Power Generation
Bibliographic record
Abstract
Most piezoelectric power generators rely on polycrystalline perovskite oxide thin films fabricated at high temperatures. Here, we report the direct room-temperature deposition of amorphous Pb(Zr,Ti)O 3 thin films onto a polymer substrate, enabling efficient bending-driven power generation. Regulation of chemical states via oxygen partial pressure during sputter deposition was crucial for inducing dipolar polarization arising from locally oriented TiO 6 octahedra at the short-range scale. The resulting amorphous films exhibited peak output voltage, power, and power density of approximately 40.4 V, 480 μW, and 3.01 × 10 6 μW cm –3, respectively, surpassing values reported for conventional polycrystalline oxide thin-film cantilevers within our knowledge. The excellent figure of merit of the energy harvester reflects a trade-off between piezoelectric response and relative permittivity. The optimized device further exhibited robust physiological sensing capabilities, highlighting the extended potential of the amorphous thin films for other functional applications.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".