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Record W4415002953 · doi:10.1109/tsm.2025.3619539

A Condition Monitoring Method via a New Signal Expansion Strategy for the Crystal Lifting and Rotating Mechanism

2025· article· en· W4415002953 on OpenAlexaff
Lingxia Mu, Ding Liu, Sunhao Wu, Yuyu Liu, Peiyuan Gao, Han Liu, Youmin Zhang

Bibliographic record

VenueIEEE Transactions on Semiconductor Manufacturing · 2025
Typearticle
Languageen
FieldEngineering
TopicVibration and Dynamic Analysis
Canadian institutionsConcordia University
FundersChina Postdoctoral Science FoundationNational Natural Science Foundation of China
KeywordsSIGNAL (programming language)Monocrystalline siliconVibrationBenchmark (surveying)Process (computing)Condition monitoringControl theory (sociology)Mechanism (biology)

Abstract

fetched live from OpenAlex

The crystal lifting and rotating mechanism (CLRM) is the key motion device during the growth process of monocrystalline silicon. The operation state of CLRM has a direct influence on the quality of the monocrystalline silicon. Typically, the CLRM operates at a slow speed with subtle changes in state and inconspicuous signal features, which makes it hard to effective diagnosis the working condition. In this paper, a vibration-signal-based diagnosis method is proposed to monitor the operation status of the CLRM. Firstly, the vibration signals are collected by the sensor installed on the certain location of the CLRM. A signal expansion strategy is then designed to extent the original signal by integration of variational mode decomposition and canonical polyadic decomposition. The characteristic of the signal is enriched. After that, the features of the expanded signals are extracted using permutation entropy, followed by the K-nearest neighbor classification. Three representative experiments are conducted to verify the performance of the proposed method using different datasets, including the benchmark vibration signal dataset, signals acquired from the experimental platform established by our laboratory, and the signals acquired during the actual growth process of monocrystalline silicon.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.001
Threshold uncertainty score0.004

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.001
Meta-epidemiology (narrow)0.0010.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0010.001
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0010.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.020
GPT teacher head0.274
Teacher spread0.254 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations0
Published2025
Admission routes1
Has abstractyes

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