Optical waveguide facet preparation using programmable focused ion beam sculpting
Bibliographic record
Abstract
One of the many processing steps for photonic device fabrication is the preparation of low-loss optical facets for fiber-chip, and chip-chip coupling. This article presents a method for facet preparation using focused ion beam (FIB) sculpting. The technique is demonstrated using commercially prepared silicon nitride waveguides. The facets exhibit coupling loss dominated by modal mismatch and are consistent with high optical quality in terms of micro-roughness and optical scattering. The process takes 30 s per facet using a FIB current of 15 nA. Higher beam currents result in the deformation of the waveguide facet with concomitant increased coupling loss. A proof-of-concept automated process is demonstrated in which 22 facets are prepared without user oversight. The programmable nature of this approach suggests a material-agnostic FIB process for facet preparation of waveguides for systems of chips integrated on a single carrier. The FIB process also has the potential to prepare alignment locators for fibers or other elements requiring optical integration.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.001 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".