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Record W4415404439 · doi:10.1038/s41467-025-64359-1

Integrated silicon nitride devices via inverse design

2025· article· en· W4415404439 on OpenAlexafffund
Julián L. Pita, Narges Dalvand, Michaël Ménard

Bibliographic record

VenueNature Communications · 2025
Typearticle
Languageen
FieldEngineering
TopicPhotonic and Optical Devices
Canadian institutionsÉcole de Technologie Supérieure
FundersNatural Sciences and Engineering Research Council of CanadaCMC Microsystems
KeywordsSilicon nitridePhotonicsSiliconHybrid silicon laserFabricationSilicon photonicsLOCOSRefractive index contrast

Abstract

fetched live from OpenAlex

Integrated photonic devices made of silicon nitride, which can be integrated with silicon-on-insulator and III-V platforms, are expected to drive the expansion of silicon photonics technology. However, the relatively low refractive index contrast of silicon nitride is often considered a limitation for creating compact and efficient devices. Here, we present three freeform silicon nitride devices-a coarse wavelength-division multiplexer, a five-mode mode division multiplexer, and a polarization beam splitter-while systematically benchmarking both the design capability and the fabrication repeatability and robustness of inverse-designed components. We demonstrate up to a 1200× reduction in footprint while maintaining relatively large minimum feature sizes of up to 160 nm, showing that inverse-designed silicon nitride devices can be as compact as their silicon counterparts. These results enable high-density integration in silicon nitride photonics and pave the way for multidimensional data transmission and quantum applications, as the inverse design technique can be applied to different silicon nitride thicknesses and is potentially extendable to other low- and mid-index contrast platforms.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Simulation or modeling · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.004

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0010.000
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.019
GPT teacher head0.271
Teacher spread0.253 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designSimulation or modeling
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations11
Published2025
Admission routes2
Has abstractyes

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