Application of Multi-Output Regression and Feature Selection Methods in Semiconductor Manufacturing
Bibliographic record
Abstract
The increasing complexity of semiconductor manufacturing calls for reliable and interpretable machine learning systems that can support decision-making in real time. In this work, we propose a virtual metrology system for predicting multiple output parameters in two physical vapor deposition processes—AlCu and WTi—based on real-world data collected from Infineon Technologies. We explore the effectiveness of machine learning models for multi-output regression and evaluate three model-based feature selection approaches alongside the projective selection method (ProjSe), a recent technique designed specifically for multi-output scenarios. Our analysis focuses on model accuracy, stability under data variation, and computational efficiency. The results show that the Extreme Gradient Boosting method achieves the highest prediction accuracy, while ProjSe provides a stable and significantly faster solution for feature selection, making it a promising candidate for industrial applications where speed and robustness are essential.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".